منابع مشابه
Modeling and Simulation of RF MEMS devices
A stable, device specific, multiple energy domain and multi scale simulation tool for Radio Frequency (RF) MicroElectroMechanicalSystems (MEMS) devices is developed. A structured design methodology is adopted for design and optimization of RF MEMS shunt switch and MEMS inductor. The Computer Aided Design (CAD) tool incorporates physical parameters such as surface roughness. An electromechanical...
متن کاملFabrication of thick silicon nitride blocks for integration of RF devices
Introduction: The enormous growth of wireless and portable applications has led to strong demands for high-performance monolithic low-cost passive components in RF and microwave integrated circuits (ICs). However, some traditional microwave passive components such as transmission lines and filters are difficult to integrate on the same chip with the RF and microwave circuits owing to the high s...
متن کاملFabrication of thick silicon nitride blocks for integration of RF devices - Electronics Letters
Introduction: The enormous growth of wireless and portable applications has led to strong demands for high-performance monolithic low-cost passive components in RF and microwave integrated circuits (ICs). However, some traditional microwave passive components such as transmission lines and filters are difficult to integrate on the same chip with the RF and microwave circuits owing to the high s...
متن کاملVibrating RF MEMS for Low Power Communications
Micromechanical communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Possible transceiver front-end architectures are then presented that use these micromechanical circuits in large quantities to substantially reduce power consumpti...
متن کاملSilicon MEMS for Photonic Bandgap Devices
An optical filter is presented based on lateral beam propagation between input and output fibers, through a 1dimensional silicon photonic bandgap (PBG) structure. Optical modelling of the device shows that a very high degree of verticality is needed for the PBG surfaces, and a fabrication technique is described by which these can be obtained, using a combination of wet and dry silicon etching s...
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ژورنال
عنوان ژورنال: III-Vs Review
سال: 2006
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(06)71641-6